$83.60
The FRn03P series micro flow gas mass flow sensors are specifically designed for various micro-flow process control applications. This series of products utilizes the MEMS thermal principle and is suitable...

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Availability: 494 In Stock
Categories: Flow sensor

The FRn03P series micro flow gas mass flow sensors are specifically designed for various micro-flow process control applications. This series of products utilizes the MEMS thermal principle and is suitable for dry, clean gases. The sensor features surface-mount installation, making it particularly suitable for multi-sensor integration in confined spaces.

Application

The sensor features surface-mount installation, making it particularly suitable for multi-sensor integration in confined spaces.

Features

  • High sensor sensitivity with very low start-up flow
  • Surface-mount installation, compact structure
  • Multiple signal output options
  • High stability and repeatability across the full scale

Specifications

  Parameter Value Unit
Flow Measurement Maximum Flow 50/100/200/300/400/500 1000/2000/3000/4000/5000 SCCM
Measurement Accuracy ±(2+0.5FS) %
Repeatability 0.50 %
Max. Working Pressure 500 kPa
Pressure Drop at Max. Flow ≤60 ≤1000 Pa
Operating Temperature 0~50
Signal Output Output Mode Digital I²C and Analog 0.5V~4.5VDC  
I²C Communication Rate 100 kHz
Signal Response Time ≤50 ms
Electrical Parameters Operating Voltage 5~15 VDC
Operating Current ≤30 mA
Electrical Interface PH2.0-5P Plug-in Connector  
Others Storage Temperature -20~65
Measurement Medium Dry, clean non-corrosive gases  

The company's flow sensors are calibrated by default using air at 20℃, 101.325 kPa. Production conditions are temperature 22±2℃, cleanroom, (30%~35%) RH environment. If special requirements exist, calibration is performed according to customer requirements.

 

* The description and specifications might be changed without notice. Please contact us for the latest information before placing orders.

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  • Reference Delivery time (working days):
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  • Fedex:3-7 days
  • China Post e-Packet : 15-35 days
Note:

Transit times may vary, particularly during the holiday season.

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