The FRn03P series micro flow gas mass flow sensors are specifically designed for various micro-flow process control applications. This series of products utilizes the MEMS thermal principle and is suitable for dry, clean gases. The sensor features surface-mount installation, making it particularly suitable for multi-sensor integration in confined spaces.

Application

The sensor features surface-mount installation, making it particularly suitable for multi-sensor integration in confined spaces.

Features

High sensor sensitivity with very low start-up flow
Surface-mount installation, compact structure
Multiple signal output options
High stability and repeatability across the full scale

Specifications

	Parameter	Value	Unit
Flow Measurement	Maximum Flow	50/100/200/300/400/500 1000/2000/3000/4000/5000	SCCM
	Measurement Accuracy	±（2+0.5FS）	%
	Repeatability	0.50	%
	Max. Working Pressure	500	kPa
	Pressure Drop at Max. Flow	≤60 ≤1000	Pa
	Operating Temperature	0～50	℃
Signal Output	Output Mode	Digital I²C and Analog 0.5V～4.5VDC
	I²C Communication Rate	100	kHz
	Signal Response Time	≤50	ms
Electrical Parameters	Operating Voltage	5～15	VDC
	Operating Current	≤30	mA
	Electrical Interface	PH2.0-5P Plug-in Connector
Others	Storage Temperature	-20～65	℃
Others	Measurement Medium	Dry, clean non-corrosive gases

The company's flow sensors are calibrated by default using air at 20℃, 101.325 kPa. Production conditions are temperature 22±2℃, cleanroom, (30%～35%) RH environment. If special requirements exist, calibration is performed according to customer requirements.

* The description and specifications might be changed without notice. Please contact us for the latest information before placing orders.

1PC FRn03P Flow Sensor